5/25/2010	10:08:20 AM	PH3 valve closed
5/25/2010	10:09:21 AM	PH3 valve opened
5/25/2010	10:09:33 AM	PH3 valve closed
5/25/2010	10:09:34 AM	Bypass valve closed
5/25/2010	10:09:35 AM	Main Vac valve closed
5/25/2010	10:13:38 AM	Main Vac valve opened
5/25/2010	10:13:38 AM	Bypass valve opened
5/25/2010	10:13:48 AM	Bypass valve closed
5/25/2010	10:13:49 AM	Main Vac valve closed
5/25/2010	10:13:52 AM	H2 MFC set to  500.000000
5/25/2010	10:13:54 AM	H2 valve opened
5/25/2010	10:15:13 AM	H2 valve closed
5/25/2010	10:15:24 AM	PH3 valve opened
5/25/2010	10:15:41 AM	H2 valve opened
5/25/2010	10:15:48 AM	H2 valve closed
5/25/2010	10:16:32 AM	PH3 valve closed
5/25/2010	10:17:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2010	10:17:48 AM	Recipe started at 10:17 AM
5/25/2010	10:17:48 AM	Helium valve closed
5/25/2010	10:17:48 AM	H2 valve closed
5/25/2010	10:17:48 AM	BCl3 valve closed
5/25/2010	10:17:48 AM	PH3 valve closed
5/25/2010	10:17:48 AM	SiCl4 pre valve closed
5/25/2010	10:17:48 AM	SiCl4 post valve closed
5/25/2010	10:17:48 AM	Main Vac valve closed
5/25/2010	10:17:48 AM	Bubbler valve closed
5/25/2010	10:17:48 AM	Bypass valve opened
5/25/2010	10:17:48 AM	Helium MFC set to  0.000000
5/25/2010	10:17:48 AM	H2 MFC set to  0.000000
5/25/2010	10:17:48 AM	BCl3 MFC set to  0.000000
5/25/2010	10:17:48 AM	SiCl4 MFC set to  0.000000
5/25/2010	10:17:48 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	10:17:48 AM	Tube furnace set to 0
5/25/2010	10:18:08 AM	Helium valve closed
5/25/2010	10:18:08 AM	H2 valve closed
5/25/2010	10:18:08 AM	BCl3 valve closed
5/25/2010	10:18:08 AM	PH3 valve closed
5/25/2010	10:18:08 AM	SiCl4 pre valve closed
5/25/2010	10:18:08 AM	SiCl4 post valve closed
5/25/2010	10:18:08 AM	Bubbler valve closed
5/25/2010	10:18:08 AM	Main Vac valve opened
5/25/2010	10:18:08 AM	Bypass valve opened
5/25/2010	10:18:08 AM	Helium MFC set to  0.000000
5/25/2010	10:18:08 AM	H2 MFC set to  0.000000
5/25/2010	10:18:08 AM	BCl3 MFC set to  0.000000
5/25/2010	10:18:08 AM	SiCl4 MFC set to  0.000000
5/25/2010	10:18:08 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	10:18:08 AM	Tube furnace set to 0
5/25/2010	10:18:08 AM	Run finished at 10:18 AM
5/25/2010	10:18:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2010	10:34:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/25/2010	10:34:36 AM	Recipe started at 10:34 AM
5/25/2010	10:34:36 AM	H2 valve closed
5/25/2010	10:34:36 AM	BCl3 valve closed
5/25/2010	10:34:36 AM	PH3 valve closed
5/25/2010	10:34:36 AM	SiCl4 pre valve closed
5/25/2010	10:34:36 AM	SiCl4 post valve closed
5/25/2010	10:34:36 AM	Main Vac valve closed
5/25/2010	10:34:36 AM	Bypass valve closed
5/25/2010	10:34:36 AM	Bubbler valve closed
5/25/2010	10:34:36 AM	Helium valve opened
5/25/2010	10:34:36 AM	Helium MFC set to  500.000000
5/25/2010	10:34:36 AM	H2 MFC set to  0.000000
5/25/2010	10:34:36 AM	BCl3 MFC set to  0.000000
5/25/2010	10:34:36 AM	SiCl4 MFC set to  0.000000
5/25/2010	10:34:36 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	10:34:36 AM	Tube furnace set to 0
5/25/2010	10:35:57 AM	Helium valve closed
5/25/2010	10:35:57 AM	H2 valve closed
5/25/2010	10:35:57 AM	BCl3 valve closed
5/25/2010	10:35:57 AM	PH3 valve closed
5/25/2010	10:35:57 AM	SiCl4 pre valve closed
5/25/2010	10:35:57 AM	SiCl4 post valve closed
5/25/2010	10:35:57 AM	Main Vac valve closed
5/25/2010	10:35:57 AM	Bypass valve closed
5/25/2010	10:35:57 AM	Bubbler valve closed
5/25/2010	10:35:57 AM	Helium MFC set to  0.000000
5/25/2010	10:35:57 AM	H2 MFC set to  0.000000
5/25/2010	10:35:57 AM	BCl3 MFC set to  0.000000
5/25/2010	10:35:57 AM	SiCl4 MFC set to  0.000000
5/25/2010	10:35:57 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	10:35:57 AM	Tube furnace set to 0
5/25/2010	10:35:57 AM	Run finished at 10:35 AM
5/25/2010	10:35:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/25/2010	10:38:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2010	10:38:35 AM	Recipe started at 10:38 AM
5/25/2010	10:38:35 AM	Helium valve closed
5/25/2010	10:38:35 AM	H2 valve closed
5/25/2010	10:38:35 AM	BCl3 valve closed
5/25/2010	10:38:35 AM	PH3 valve closed
5/25/2010	10:38:35 AM	SiCl4 pre valve closed
5/25/2010	10:38:35 AM	SiCl4 post valve closed
5/25/2010	10:38:35 AM	Main Vac valve closed
5/25/2010	10:38:35 AM	Bubbler valve closed
5/25/2010	10:38:35 AM	Bypass valve opened
5/25/2010	10:38:35 AM	Helium MFC set to  0.000000
5/25/2010	10:38:35 AM	H2 MFC set to  0.000000
5/25/2010	10:38:35 AM	BCl3 MFC set to  0.000000
5/25/2010	10:38:35 AM	SiCl4 MFC set to  0.000000
5/25/2010	10:38:35 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	10:38:35 AM	Tube furnace set to 0
5/25/2010	10:39:20 AM	Helium valve closed
5/25/2010	10:39:20 AM	H2 valve closed
5/25/2010	10:39:20 AM	BCl3 valve closed
5/25/2010	10:39:20 AM	PH3 valve closed
5/25/2010	10:39:20 AM	SiCl4 pre valve closed
5/25/2010	10:39:20 AM	SiCl4 post valve closed
5/25/2010	10:39:20 AM	Bubbler valve closed
5/25/2010	10:39:20 AM	Main Vac valve opened
5/25/2010	10:39:20 AM	Bypass valve opened
5/25/2010	10:39:20 AM	Helium MFC set to  0.000000
5/25/2010	10:39:20 AM	H2 MFC set to  0.000000
5/25/2010	10:39:20 AM	BCl3 MFC set to  0.000000
5/25/2010	10:39:20 AM	SiCl4 MFC set to  0.000000
5/25/2010	10:39:20 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	10:39:21 AM	Tube furnace set to 0
5/25/2010	10:39:21 AM	Run finished at 10:39 AM
5/25/2010	10:39:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2010	10:44:36 AM	Helium MFC set to  100.000000
5/25/2010	10:44:37 AM	Helium valve opened
5/25/2010	10:46:01 AM	Helium valve closed
5/25/2010	10:53:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/25/2010	10:53:50 AM	Recipe started at 10:53 AM
5/25/2010	10:53:50 AM	H2 valve closed
5/25/2010	10:53:50 AM	BCl3 valve closed
5/25/2010	10:53:50 AM	PH3 valve closed
5/25/2010	10:53:50 AM	SiCl4 pre valve closed
5/25/2010	10:53:50 AM	SiCl4 post valve closed
5/25/2010	10:53:50 AM	Main Vac valve closed
5/25/2010	10:53:50 AM	Bypass valve closed
5/25/2010	10:53:50 AM	Bubbler valve closed
5/25/2010	10:53:50 AM	Helium valve opened
5/25/2010	10:53:50 AM	Helium MFC set to  500.000000
5/25/2010	10:53:50 AM	H2 MFC set to  0.000000
5/25/2010	10:53:50 AM	BCl3 MFC set to  0.000000
5/25/2010	10:53:50 AM	SiCl4 MFC set to  0.000000
5/25/2010	10:53:50 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	10:53:50 AM	Tube furnace set to 0
5/25/2010	10:55:10 AM	Helium valve closed
5/25/2010	10:55:10 AM	H2 valve closed
5/25/2010	10:55:10 AM	BCl3 valve closed
5/25/2010	10:55:10 AM	PH3 valve closed
5/25/2010	10:55:10 AM	SiCl4 pre valve closed
5/25/2010	10:55:10 AM	SiCl4 post valve closed
5/25/2010	10:55:10 AM	Main Vac valve closed
5/25/2010	10:55:10 AM	Bypass valve closed
5/25/2010	10:55:10 AM	Bubbler valve closed
5/25/2010	10:55:10 AM	Helium MFC set to  0.000000
5/25/2010	10:55:10 AM	H2 MFC set to  0.000000
5/25/2010	10:55:10 AM	BCl3 MFC set to  0.000000
5/25/2010	10:55:10 AM	SiCl4 MFC set to  0.000000
5/25/2010	10:55:10 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	10:55:10 AM	Tube furnace set to 0
5/25/2010	10:55:10 AM	Run finished at 10:55 AM
5/25/2010	10:55:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/25/2010	10:59:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2010	10:59:34 AM	Recipe started at 10:59 AM
5/25/2010	10:59:34 AM	Helium valve closed
5/25/2010	10:59:34 AM	H2 valve closed
5/25/2010	10:59:34 AM	BCl3 valve closed
5/25/2010	10:59:34 AM	PH3 valve closed
5/25/2010	10:59:34 AM	SiCl4 pre valve closed
5/25/2010	10:59:34 AM	SiCl4 post valve closed
5/25/2010	10:59:34 AM	Main Vac valve closed
5/25/2010	10:59:34 AM	Bubbler valve closed
5/25/2010	10:59:34 AM	Bypass valve opened
5/25/2010	10:59:34 AM	Helium MFC set to  0.000000
5/25/2010	10:59:34 AM	H2 MFC set to  0.000000
5/25/2010	10:59:34 AM	BCl3 MFC set to  0.000000
5/25/2010	10:59:34 AM	SiCl4 MFC set to  0.000000
5/25/2010	10:59:34 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	10:59:34 AM	Tube furnace set to 0
5/25/2010	11:00:20 AM	Helium valve closed
5/25/2010	11:00:20 AM	H2 valve closed
5/25/2010	11:00:20 AM	BCl3 valve closed
5/25/2010	11:00:20 AM	PH3 valve closed
5/25/2010	11:00:20 AM	SiCl4 pre valve closed
5/25/2010	11:00:20 AM	SiCl4 post valve closed
5/25/2010	11:00:20 AM	Bubbler valve closed
5/25/2010	11:00:20 AM	Main Vac valve opened
5/25/2010	11:00:20 AM	Bypass valve opened
5/25/2010	11:00:20 AM	Helium MFC set to  0.000000
5/25/2010	11:00:20 AM	H2 MFC set to  0.000000
5/25/2010	11:00:20 AM	BCl3 MFC set to  0.000000
5/25/2010	11:00:20 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:00:20 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:00:20 AM	Tube furnace set to 0
5/25/2010	11:00:20 AM	Run finished at 11:00 AM
5/25/2010	11:00:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2010	11:05:26 AM	Bypass valve closed
5/25/2010	11:05:26 AM	Main Vac valve closed
5/25/2010	11:06:00 AM	Bypass valve opened
5/25/2010	11:06:00 AM	Main Vac valve opened
5/25/2010	11:06:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/25/2010	11:06:18 AM	Recipe started at 11:06 AM
5/25/2010	11:06:18 AM	H2 valve closed
5/25/2010	11:06:18 AM	BCl3 valve closed
5/25/2010	11:06:18 AM	PH3 valve closed
5/25/2010	11:06:18 AM	SiCl4 pre valve closed
5/25/2010	11:06:18 AM	SiCl4 post valve closed
5/25/2010	11:06:18 AM	Main Vac valve closed
5/25/2010	11:06:18 AM	Bypass valve closed
5/25/2010	11:06:18 AM	Bubbler valve closed
5/25/2010	11:06:18 AM	Helium valve opened
5/25/2010	11:06:18 AM	Helium MFC set to  500.000000
5/25/2010	11:06:18 AM	H2 MFC set to  0.000000
5/25/2010	11:06:18 AM	BCl3 MFC set to  0.000000
5/25/2010	11:06:18 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:06:18 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:06:19 AM	Tube furnace set to 0
5/25/2010	11:07:41 AM	Helium valve closed
5/25/2010	11:07:41 AM	H2 valve closed
5/25/2010	11:07:41 AM	BCl3 valve closed
5/25/2010	11:07:41 AM	PH3 valve closed
5/25/2010	11:07:41 AM	SiCl4 pre valve closed
5/25/2010	11:07:41 AM	SiCl4 post valve closed
5/25/2010	11:07:41 AM	Main Vac valve closed
5/25/2010	11:07:41 AM	Bypass valve closed
5/25/2010	11:07:41 AM	Bubbler valve closed
5/25/2010	11:07:41 AM	Helium MFC set to  0.000000
5/25/2010	11:07:41 AM	H2 MFC set to  0.000000
5/25/2010	11:07:41 AM	BCl3 MFC set to  0.000000
5/25/2010	11:07:41 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:07:41 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:07:41 AM	Tube furnace set to 0
5/25/2010	11:07:56 AM	Helium valve closed
5/25/2010	11:07:56 AM	H2 valve closed
5/25/2010	11:07:56 AM	BCl3 valve closed
5/25/2010	11:07:56 AM	PH3 valve closed
5/25/2010	11:07:56 AM	SiCl4 pre valve closed
5/25/2010	11:07:56 AM	SiCl4 post valve closed
5/25/2010	11:07:56 AM	Main Vac valve closed
5/25/2010	11:07:56 AM	Bubbler valve closed
5/25/2010	11:07:56 AM	Bypass valve opened
5/25/2010	11:07:56 AM	Helium MFC set to  0.000000
5/25/2010	11:07:56 AM	H2 MFC set to  0.000000
5/25/2010	11:07:56 AM	BCl3 MFC set to  0.000000
5/25/2010	11:07:56 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:07:56 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:07:56 AM	Tube furnace set to 0
5/25/2010	11:08:29 AM	Helium valve closed
5/25/2010	11:08:29 AM	H2 valve closed
5/25/2010	11:08:29 AM	BCl3 valve closed
5/25/2010	11:08:29 AM	PH3 valve closed
5/25/2010	11:08:29 AM	SiCl4 pre valve closed
5/25/2010	11:08:29 AM	SiCl4 post valve closed
5/25/2010	11:08:29 AM	Bubbler valve closed
5/25/2010	11:08:29 AM	Main Vac valve opened
5/25/2010	11:08:29 AM	Bypass valve opened
5/25/2010	11:08:29 AM	Helium MFC set to  0.000000
5/25/2010	11:08:29 AM	H2 MFC set to  0.000000
5/25/2010	11:08:29 AM	BCl3 MFC set to  0.000000
5/25/2010	11:08:29 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:08:29 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:08:29 AM	Tube furnace set to 0
5/25/2010	11:13:29 AM	H2 valve closed
5/25/2010	11:13:29 AM	BCl3 valve closed
5/25/2010	11:13:29 AM	PH3 valve closed
5/25/2010	11:13:29 AM	SiCl4 pre valve closed
5/25/2010	11:13:29 AM	SiCl4 post valve closed
5/25/2010	11:13:29 AM	Main Vac valve closed
5/25/2010	11:13:29 AM	Bypass valve closed
5/25/2010	11:13:29 AM	Bubbler valve closed
5/25/2010	11:13:29 AM	Helium valve opened
5/25/2010	11:13:29 AM	Helium MFC set to  500.000000
5/25/2010	11:13:29 AM	H2 MFC set to  0.000000
5/25/2010	11:13:29 AM	BCl3 MFC set to  0.000000
5/25/2010	11:13:29 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:13:29 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:13:30 AM	Tube furnace set to 0
5/25/2010	11:14:52 AM	Helium valve closed
5/25/2010	11:14:52 AM	H2 valve closed
5/25/2010	11:14:52 AM	BCl3 valve closed
5/25/2010	11:14:52 AM	PH3 valve closed
5/25/2010	11:14:52 AM	SiCl4 pre valve closed
5/25/2010	11:14:52 AM	SiCl4 post valve closed
5/25/2010	11:14:52 AM	Main Vac valve closed
5/25/2010	11:14:52 AM	Bypass valve closed
5/25/2010	11:14:52 AM	Bubbler valve closed
5/25/2010	11:14:52 AM	Helium MFC set to  0.000000
5/25/2010	11:14:52 AM	H2 MFC set to  0.000000
5/25/2010	11:14:52 AM	BCl3 MFC set to  0.000000
5/25/2010	11:14:52 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:14:52 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:14:52 AM	Tube furnace set to 0
5/25/2010	11:15:07 AM	Helium valve closed
5/25/2010	11:15:07 AM	H2 valve closed
5/25/2010	11:15:07 AM	BCl3 valve closed
5/25/2010	11:15:07 AM	PH3 valve closed
5/25/2010	11:15:07 AM	SiCl4 pre valve closed
5/25/2010	11:15:07 AM	SiCl4 post valve closed
5/25/2010	11:15:07 AM	Main Vac valve closed
5/25/2010	11:15:07 AM	Bubbler valve closed
5/25/2010	11:15:07 AM	Bypass valve opened
5/25/2010	11:15:07 AM	Helium MFC set to  0.000000
5/25/2010	11:15:07 AM	H2 MFC set to  0.000000
5/25/2010	11:15:07 AM	BCl3 MFC set to  0.000000
5/25/2010	11:15:07 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:15:07 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:15:07 AM	Tube furnace set to 0
5/25/2010	11:15:40 AM	Helium valve closed
5/25/2010	11:15:40 AM	H2 valve closed
5/25/2010	11:15:40 AM	BCl3 valve closed
5/25/2010	11:15:40 AM	PH3 valve closed
5/25/2010	11:15:40 AM	SiCl4 pre valve closed
5/25/2010	11:15:40 AM	SiCl4 post valve closed
5/25/2010	11:15:40 AM	Bubbler valve closed
5/25/2010	11:15:40 AM	Main Vac valve opened
5/25/2010	11:15:40 AM	Bypass valve opened
5/25/2010	11:15:40 AM	Helium MFC set to  0.000000
5/25/2010	11:15:40 AM	H2 MFC set to  0.000000
5/25/2010	11:15:40 AM	BCl3 MFC set to  0.000000
5/25/2010	11:15:40 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:15:40 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:15:40 AM	Tube furnace set to 0
5/25/2010	11:20:40 AM	H2 valve closed
5/25/2010	11:20:40 AM	BCl3 valve closed
5/25/2010	11:20:40 AM	PH3 valve closed
5/25/2010	11:20:40 AM	SiCl4 pre valve closed
5/25/2010	11:20:40 AM	SiCl4 post valve closed
5/25/2010	11:20:40 AM	Main Vac valve closed
5/25/2010	11:20:40 AM	Bypass valve closed
5/25/2010	11:20:40 AM	Bubbler valve closed
5/25/2010	11:20:40 AM	Helium valve opened
5/25/2010	11:20:40 AM	Helium MFC set to  500.000000
5/25/2010	11:20:40 AM	H2 MFC set to  0.000000
5/25/2010	11:20:40 AM	BCl3 MFC set to  0.000000
5/25/2010	11:20:40 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:20:40 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:20:41 AM	Tube furnace set to 0
5/25/2010	11:22:03 AM	Helium valve closed
5/25/2010	11:22:03 AM	H2 valve closed
5/25/2010	11:22:03 AM	BCl3 valve closed
5/25/2010	11:22:03 AM	PH3 valve closed
5/25/2010	11:22:03 AM	SiCl4 pre valve closed
5/25/2010	11:22:03 AM	SiCl4 post valve closed
5/25/2010	11:22:03 AM	Main Vac valve closed
5/25/2010	11:22:03 AM	Bypass valve closed
5/25/2010	11:22:03 AM	Bubbler valve closed
5/25/2010	11:22:03 AM	Helium MFC set to  0.000000
5/25/2010	11:22:03 AM	H2 MFC set to  0.000000
5/25/2010	11:22:03 AM	BCl3 MFC set to  0.000000
5/25/2010	11:22:03 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:22:03 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:22:03 AM	Tube furnace set to 0
5/25/2010	11:22:18 AM	Helium valve closed
5/25/2010	11:22:18 AM	H2 valve closed
5/25/2010	11:22:18 AM	BCl3 valve closed
5/25/2010	11:22:18 AM	PH3 valve closed
5/25/2010	11:22:18 AM	SiCl4 pre valve closed
5/25/2010	11:22:18 AM	SiCl4 post valve closed
5/25/2010	11:22:18 AM	Main Vac valve closed
5/25/2010	11:22:18 AM	Bubbler valve closed
5/25/2010	11:22:18 AM	Bypass valve opened
5/25/2010	11:22:18 AM	Helium MFC set to  0.000000
5/25/2010	11:22:18 AM	H2 MFC set to  0.000000
5/25/2010	11:22:18 AM	BCl3 MFC set to  0.000000
5/25/2010	11:22:18 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:22:18 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:22:18 AM	Tube furnace set to 0
5/25/2010	11:22:51 AM	Helium valve closed
5/25/2010	11:22:51 AM	H2 valve closed
5/25/2010	11:22:51 AM	BCl3 valve closed
5/25/2010	11:22:51 AM	PH3 valve closed
5/25/2010	11:22:51 AM	SiCl4 pre valve closed
5/25/2010	11:22:51 AM	SiCl4 post valve closed
5/25/2010	11:22:51 AM	Bubbler valve closed
5/25/2010	11:22:51 AM	Main Vac valve opened
5/25/2010	11:22:51 AM	Bypass valve opened
5/25/2010	11:22:51 AM	Helium MFC set to  0.000000
5/25/2010	11:22:51 AM	H2 MFC set to  0.000000
5/25/2010	11:22:51 AM	BCl3 MFC set to  0.000000
5/25/2010	11:22:51 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:22:51 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:22:52 AM	Tube furnace set to 0
5/25/2010	11:27:52 AM	Helium valve closed
5/25/2010	11:27:52 AM	H2 valve closed
5/25/2010	11:27:52 AM	BCl3 valve closed
5/25/2010	11:27:52 AM	PH3 valve closed
5/25/2010	11:27:52 AM	SiCl4 pre valve closed
5/25/2010	11:27:52 AM	SiCl4 post valve closed
5/25/2010	11:27:52 AM	Bubbler valve closed
5/25/2010	11:27:52 AM	Main Vac valve opened
5/25/2010	11:27:52 AM	Bypass valve opened
5/25/2010	11:27:52 AM	Helium MFC set to  0.000000
5/25/2010	11:27:52 AM	H2 MFC set to  0.000000
5/25/2010	11:27:52 AM	BCl3 MFC set to  0.000000
5/25/2010	11:27:52 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:27:52 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:27:52 AM	Tube furnace set to 0
5/25/2010	11:27:53 AM	Run finished at 11:27 AM
5/25/2010	11:27:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/25/2010	11:50:39 AM	Bypass valve closed
5/25/2010	11:50:39 AM	Main Vac valve closed
5/25/2010	11:50:50 AM	Bypass valve opened
5/25/2010	11:50:51 AM	Main Vac valve opened
5/25/2010	11:50:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/25/2010	11:51:05 AM	Recipe started at 11:51 AM
5/25/2010	11:51:05 AM	H2 valve closed
5/25/2010	11:51:05 AM	BCl3 valve closed
5/25/2010	11:51:05 AM	PH3 valve closed
5/25/2010	11:51:05 AM	SiCl4 pre valve closed
5/25/2010	11:51:05 AM	SiCl4 post valve closed
5/25/2010	11:51:05 AM	Main Vac valve closed
5/25/2010	11:51:05 AM	Bypass valve closed
5/25/2010	11:51:05 AM	Bubbler valve closed
5/25/2010	11:51:05 AM	Helium valve opened
5/25/2010	11:51:05 AM	Helium MFC set to  500.000000
5/25/2010	11:51:05 AM	H2 MFC set to  0.000000
5/25/2010	11:51:05 AM	BCl3 MFC set to  0.000000
5/25/2010	11:51:05 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:51:05 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:51:05 AM	Tube furnace set to 0
5/25/2010	11:52:27 AM	Helium valve closed
5/25/2010	11:52:27 AM	H2 valve closed
5/25/2010	11:52:27 AM	BCl3 valve closed
5/25/2010	11:52:27 AM	PH3 valve closed
5/25/2010	11:52:27 AM	SiCl4 pre valve closed
5/25/2010	11:52:27 AM	SiCl4 post valve closed
5/25/2010	11:52:27 AM	Main Vac valve closed
5/25/2010	11:52:27 AM	Bypass valve closed
5/25/2010	11:52:27 AM	Bubbler valve closed
5/25/2010	11:52:27 AM	Helium MFC set to  0.000000
5/25/2010	11:52:27 AM	H2 MFC set to  0.000000
5/25/2010	11:52:27 AM	BCl3 MFC set to  0.000000
5/25/2010	11:52:27 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:52:27 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:52:28 AM	Tube furnace set to 0
5/25/2010	11:52:43 AM	Helium valve closed
5/25/2010	11:52:43 AM	H2 valve closed
5/25/2010	11:52:43 AM	BCl3 valve closed
5/25/2010	11:52:43 AM	PH3 valve closed
5/25/2010	11:52:43 AM	SiCl4 pre valve closed
5/25/2010	11:52:43 AM	SiCl4 post valve closed
5/25/2010	11:52:43 AM	Main Vac valve closed
5/25/2010	11:52:43 AM	Bubbler valve closed
5/25/2010	11:52:43 AM	Bypass valve opened
5/25/2010	11:52:43 AM	Helium MFC set to  0.000000
5/25/2010	11:52:43 AM	H2 MFC set to  0.000000
5/25/2010	11:52:43 AM	BCl3 MFC set to  0.000000
5/25/2010	11:52:43 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:52:43 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:52:43 AM	Tube furnace set to 0
5/25/2010	11:53:16 AM	Helium valve closed
5/25/2010	11:53:16 AM	H2 valve closed
5/25/2010	11:53:16 AM	BCl3 valve closed
5/25/2010	11:53:16 AM	PH3 valve closed
5/25/2010	11:53:16 AM	SiCl4 pre valve closed
5/25/2010	11:53:16 AM	SiCl4 post valve closed
5/25/2010	11:53:16 AM	Bubbler valve closed
5/25/2010	11:53:16 AM	Main Vac valve opened
5/25/2010	11:53:16 AM	Bypass valve opened
5/25/2010	11:53:16 AM	Helium MFC set to  0.000000
5/25/2010	11:53:16 AM	H2 MFC set to  0.000000
5/25/2010	11:53:16 AM	BCl3 MFC set to  0.000000
5/25/2010	11:53:16 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:53:16 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:53:16 AM	Tube furnace set to 0
5/25/2010	11:58:16 AM	H2 valve closed
5/25/2010	11:58:16 AM	BCl3 valve closed
5/25/2010	11:58:16 AM	PH3 valve closed
5/25/2010	11:58:16 AM	SiCl4 pre valve closed
5/25/2010	11:58:16 AM	SiCl4 post valve closed
5/25/2010	11:58:16 AM	Main Vac valve closed
5/25/2010	11:58:16 AM	Bypass valve closed
5/25/2010	11:58:16 AM	Bubbler valve closed
5/25/2010	11:58:16 AM	Helium valve opened
5/25/2010	11:58:16 AM	Helium MFC set to  500.000000
5/25/2010	11:58:16 AM	H2 MFC set to  0.000000
5/25/2010	11:58:16 AM	BCl3 MFC set to  0.000000
5/25/2010	11:58:16 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:58:16 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:58:16 AM	Tube furnace set to 0
5/25/2010	11:59:39 AM	Helium valve closed
5/25/2010	11:59:39 AM	H2 valve closed
5/25/2010	11:59:39 AM	BCl3 valve closed
5/25/2010	11:59:39 AM	PH3 valve closed
5/25/2010	11:59:39 AM	SiCl4 pre valve closed
5/25/2010	11:59:39 AM	SiCl4 post valve closed
5/25/2010	11:59:39 AM	Main Vac valve closed
5/25/2010	11:59:39 AM	Bypass valve closed
5/25/2010	11:59:39 AM	Bubbler valve closed
5/25/2010	11:59:39 AM	Helium MFC set to  0.000000
5/25/2010	11:59:39 AM	H2 MFC set to  0.000000
5/25/2010	11:59:39 AM	BCl3 MFC set to  0.000000
5/25/2010	11:59:39 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:59:39 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:59:39 AM	Tube furnace set to 0
5/25/2010	11:59:54 AM	Helium valve closed
5/25/2010	11:59:54 AM	H2 valve closed
5/25/2010	11:59:54 AM	BCl3 valve closed
5/25/2010	11:59:54 AM	PH3 valve closed
5/25/2010	11:59:54 AM	SiCl4 pre valve closed
5/25/2010	11:59:54 AM	SiCl4 post valve closed
5/25/2010	11:59:54 AM	Main Vac valve closed
5/25/2010	11:59:54 AM	Bubbler valve closed
5/25/2010	11:59:54 AM	Bypass valve opened
5/25/2010	11:59:54 AM	Helium MFC set to  0.000000
5/25/2010	11:59:54 AM	H2 MFC set to  0.000000
5/25/2010	11:59:54 AM	BCl3 MFC set to  0.000000
5/25/2010	11:59:54 AM	SiCl4 MFC set to  0.000000
5/25/2010	11:59:54 AM	Bypass solenoid MFC set to  0.000000
5/25/2010	11:59:54 AM	Tube furnace set to 0
5/25/2010	12:00:27 PM	Helium valve closed
5/25/2010	12:00:27 PM	H2 valve closed
5/25/2010	12:00:27 PM	BCl3 valve closed
5/25/2010	12:00:27 PM	PH3 valve closed
5/25/2010	12:00:27 PM	SiCl4 pre valve closed
5/25/2010	12:00:27 PM	SiCl4 post valve closed
5/25/2010	12:00:27 PM	Bubbler valve closed
5/25/2010	12:00:27 PM	Main Vac valve opened
5/25/2010	12:00:27 PM	Bypass valve opened
5/25/2010	12:00:27 PM	Helium MFC set to  0.000000
5/25/2010	12:00:27 PM	H2 MFC set to  0.000000
5/25/2010	12:00:27 PM	BCl3 MFC set to  0.000000
5/25/2010	12:00:27 PM	SiCl4 MFC set to  0.000000
5/25/2010	12:00:27 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	12:00:27 PM	Tube furnace set to 0
5/25/2010	12:05:27 PM	H2 valve closed
5/25/2010	12:05:27 PM	BCl3 valve closed
5/25/2010	12:05:27 PM	PH3 valve closed
5/25/2010	12:05:27 PM	SiCl4 pre valve closed
5/25/2010	12:05:27 PM	SiCl4 post valve closed
5/25/2010	12:05:27 PM	Main Vac valve closed
5/25/2010	12:05:27 PM	Bypass valve closed
5/25/2010	12:05:27 PM	Bubbler valve closed
5/25/2010	12:05:27 PM	Helium valve opened
5/25/2010	12:05:27 PM	Helium MFC set to  500.000000
5/25/2010	12:05:27 PM	H2 MFC set to  0.000000
5/25/2010	12:05:27 PM	BCl3 MFC set to  0.000000
5/25/2010	12:05:27 PM	SiCl4 MFC set to  0.000000
5/25/2010	12:05:27 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	12:05:27 PM	Tube furnace set to 0
5/25/2010	12:06:50 PM	Helium valve closed
5/25/2010	12:06:50 PM	H2 valve closed
5/25/2010	12:06:50 PM	BCl3 valve closed
5/25/2010	12:06:50 PM	PH3 valve closed
5/25/2010	12:06:50 PM	SiCl4 pre valve closed
5/25/2010	12:06:50 PM	SiCl4 post valve closed
5/25/2010	12:06:50 PM	Main Vac valve closed
5/25/2010	12:06:50 PM	Bypass valve closed
5/25/2010	12:06:50 PM	Bubbler valve closed
5/25/2010	12:06:50 PM	Helium MFC set to  0.000000
5/25/2010	12:06:50 PM	H2 MFC set to  0.000000
5/25/2010	12:06:50 PM	BCl3 MFC set to  0.000000
5/25/2010	12:06:50 PM	SiCl4 MFC set to  0.000000
5/25/2010	12:06:50 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	12:06:50 PM	Tube furnace set to 0
5/25/2010	12:07:05 PM	Helium valve closed
5/25/2010	12:07:05 PM	H2 valve closed
5/25/2010	12:07:05 PM	BCl3 valve closed
5/25/2010	12:07:05 PM	PH3 valve closed
5/25/2010	12:07:05 PM	SiCl4 pre valve closed
5/25/2010	12:07:05 PM	SiCl4 post valve closed
5/25/2010	12:07:05 PM	Main Vac valve closed
5/25/2010	12:07:05 PM	Bubbler valve closed
5/25/2010	12:07:05 PM	Bypass valve opened
5/25/2010	12:07:05 PM	Helium MFC set to  0.000000
5/25/2010	12:07:05 PM	H2 MFC set to  0.000000
5/25/2010	12:07:05 PM	BCl3 MFC set to  0.000000
5/25/2010	12:07:05 PM	SiCl4 MFC set to  0.000000
5/25/2010	12:07:05 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	12:07:05 PM	Tube furnace set to 0
5/25/2010	12:07:38 PM	Helium valve closed
5/25/2010	12:07:38 PM	H2 valve closed
5/25/2010	12:07:38 PM	BCl3 valve closed
5/25/2010	12:07:38 PM	PH3 valve closed
5/25/2010	12:07:38 PM	SiCl4 pre valve closed
5/25/2010	12:07:38 PM	SiCl4 post valve closed
5/25/2010	12:07:38 PM	Bubbler valve closed
5/25/2010	12:07:38 PM	Main Vac valve opened
5/25/2010	12:07:38 PM	Bypass valve opened
5/25/2010	12:07:38 PM	Helium MFC set to  0.000000
5/25/2010	12:07:38 PM	H2 MFC set to  0.000000
5/25/2010	12:07:38 PM	BCl3 MFC set to  0.000000
5/25/2010	12:07:38 PM	SiCl4 MFC set to  0.000000
5/25/2010	12:07:38 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	12:07:38 PM	Tube furnace set to 0
5/25/2010	12:12:38 PM	Helium valve closed
5/25/2010	12:12:38 PM	H2 valve closed
5/25/2010	12:12:38 PM	BCl3 valve closed
5/25/2010	12:12:38 PM	PH3 valve closed
5/25/2010	12:12:38 PM	SiCl4 pre valve closed
5/25/2010	12:12:38 PM	SiCl4 post valve closed
5/25/2010	12:12:38 PM	Bubbler valve closed
5/25/2010	12:12:38 PM	Main Vac valve opened
5/25/2010	12:12:38 PM	Bypass valve opened
5/25/2010	12:12:38 PM	Helium MFC set to  0.000000
5/25/2010	12:12:38 PM	H2 MFC set to  0.000000
5/25/2010	12:12:38 PM	BCl3 MFC set to  0.000000
5/25/2010	12:12:38 PM	SiCl4 MFC set to  0.000000
5/25/2010	12:12:38 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	12:12:39 PM	Tube furnace set to 0
5/25/2010	12:12:40 PM	Run finished at 12:12 PM
5/25/2010	12:12:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/25/2010	1:13:19 PM	Bypass valve closed
5/25/2010	1:13:20 PM	Main Vac valve closed
5/25/2010	1:13:32 PM	Bypass valve opened
5/25/2010	1:13:32 PM	Main Vac valve opened
5/25/2010	1:18:00 PM	Recipe started at 1:17 PM
5/25/2010	1:18:00 PM	Helium valve closed
5/25/2010	1:18:00 PM	BCl3 valve closed
5/25/2010	1:18:00 PM	PH3 valve closed
5/25/2010	1:18:00 PM	SiCl4 pre valve closed
5/25/2010	1:18:00 PM	SiCl4 post valve closed
5/25/2010	1:18:00 PM	Main Vac valve closed
5/25/2010	1:18:00 PM	Bypass valve closed
5/25/2010	1:18:00 PM	Bubbler valve closed
5/25/2010	1:18:00 PM	H2 valve opened
5/25/2010	1:18:00 PM	Helium MFC set to  0.000000
5/25/2010	1:18:00 PM	H2 MFC set to  500.000000
5/25/2010	1:18:00 PM	BCl3 MFC set to  0.000000
5/25/2010	1:18:00 PM	SiCl4 MFC set to  0.000000
5/25/2010	1:18:00 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	1:18:00 PM	Tube furnace set to 0
5/25/2010	1:19:23 PM	Helium valve closed
5/25/2010	1:19:23 PM	BCl3 valve closed
5/25/2010	1:19:23 PM	PH3 valve closed
5/25/2010	1:19:23 PM	SiCl4 pre valve closed
5/25/2010	1:19:23 PM	SiCl4 post valve closed
5/25/2010	1:19:23 PM	Main Vac valve closed
5/25/2010	1:19:23 PM	Bypass valve closed
5/25/2010	1:19:23 PM	H2 valve opened
5/25/2010	1:19:23 PM	Bubbler valve opened
5/25/2010	1:19:23 PM	Helium MFC set to  0.000000
5/25/2010	1:19:23 PM	H2 MFC set to  500.000000
5/25/2010	1:19:23 PM	BCl3 MFC set to  0.000000
5/25/2010	1:19:23 PM	SiCl4 MFC set to  0.000000
5/25/2010	1:19:23 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	1:19:23 PM	Tube furnace set to 1000
5/25/2010	1:39:23 PM	Helium valve closed
5/25/2010	1:39:23 PM	PH3 valve closed
5/25/2010	1:39:23 PM	Main Vac valve closed
5/25/2010	1:39:23 PM	Bypass valve closed
5/25/2010	1:39:23 PM	H2 valve opened
5/25/2010	1:39:23 PM	BCl3 valve opened
5/25/2010	1:39:23 PM	SiCl4 pre valve opened
5/25/2010	1:39:23 PM	SiCl4 post valve opened
5/25/2010	1:39:23 PM	Bubbler valve opened
5/25/2010	1:39:23 PM	Helium MFC set to  0.000000
5/25/2010	1:39:23 PM	H2 MFC set to  500.000000
5/25/2010	1:39:23 PM	BCl3 MFC set to  35.000000
5/25/2010	1:39:23 PM	SiCl4 MFC set to  500.000000
5/25/2010	1:39:23 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	1:39:24 PM	Tube furnace set to 1000
5/25/2010	1:59:23 PM	H2 valve closed
5/25/2010	1:59:23 PM	BCl3 valve closed
5/25/2010	1:59:23 PM	PH3 valve closed
5/25/2010	1:59:23 PM	SiCl4 pre valve closed
5/25/2010	1:59:23 PM	SiCl4 post valve closed
5/25/2010	1:59:23 PM	Main Vac valve closed
5/25/2010	1:59:24 PM	Bypass valve closed
5/25/2010	1:59:24 PM	Helium valve opened
5/25/2010	1:59:24 PM	Bubbler valve opened
5/25/2010	1:59:24 PM	Helium MFC set to  500.000000
5/25/2010	1:59:24 PM	H2 MFC set to  0.000000
5/25/2010	1:59:24 PM	BCl3 MFC set to  0.000000
5/25/2010	1:59:24 PM	SiCl4 MFC set to  0.000000
5/25/2010	1:59:24 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	1:59:24 PM	Tube furnace set to 0
5/25/2010	2:19:24 PM	Helium valve closed
5/25/2010	2:19:24 PM	H2 valve closed
5/25/2010	2:19:24 PM	BCl3 valve closed
5/25/2010	2:19:24 PM	PH3 valve closed
5/25/2010	2:19:24 PM	SiCl4 pre valve closed
5/25/2010	2:19:24 PM	SiCl4 post valve closed
5/25/2010	2:19:24 PM	Main Vac valve closed
5/25/2010	2:19:24 PM	Bypass valve closed
5/25/2010	2:19:24 PM	Bubbler valve closed
5/25/2010	2:19:24 PM	Helium MFC set to  0.000000
5/25/2010	2:19:24 PM	H2 MFC set to  0.000000
5/25/2010	2:19:24 PM	BCl3 MFC set to  0.000000
5/25/2010	2:19:24 PM	SiCl4 MFC set to  0.000000
5/25/2010	2:19:24 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	2:19:24 PM	Tube furnace set to 0
5/25/2010	2:19:24 PM	Run finished at 2:19 PM
5/25/2010	2:30:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2010	2:30:34 PM	Recipe started at 2:30 PM
5/25/2010	2:30:34 PM	Helium valve closed
5/25/2010	2:30:34 PM	H2 valve closed
5/25/2010	2:30:34 PM	BCl3 valve closed
5/25/2010	2:30:34 PM	PH3 valve closed
5/25/2010	2:30:34 PM	SiCl4 pre valve closed
5/25/2010	2:30:34 PM	SiCl4 post valve closed
5/25/2010	2:30:34 PM	Main Vac valve closed
5/25/2010	2:30:34 PM	Bubbler valve closed
5/25/2010	2:30:34 PM	Bypass valve opened
5/25/2010	2:30:34 PM	Helium MFC set to  0.000000
5/25/2010	2:30:34 PM	H2 MFC set to  0.000000
5/25/2010	2:30:34 PM	BCl3 MFC set to  0.000000
5/25/2010	2:30:34 PM	SiCl4 MFC set to  0.000000
5/25/2010	2:30:34 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	2:30:34 PM	Tube furnace set to 0
5/25/2010	2:31:22 PM	Helium valve closed
5/25/2010	2:31:22 PM	H2 valve closed
5/25/2010	2:31:22 PM	BCl3 valve closed
5/25/2010	2:31:22 PM	PH3 valve closed
5/25/2010	2:31:22 PM	SiCl4 pre valve closed
5/25/2010	2:31:22 PM	SiCl4 post valve closed
5/25/2010	2:31:22 PM	Bubbler valve closed
5/25/2010	2:31:22 PM	Main Vac valve opened
5/25/2010	2:31:22 PM	Bypass valve opened
5/25/2010	2:31:22 PM	Helium MFC set to  0.000000
5/25/2010	2:31:22 PM	H2 MFC set to  0.000000
5/25/2010	2:31:22 PM	BCl3 MFC set to  0.000000
5/25/2010	2:31:22 PM	SiCl4 MFC set to  0.000000
5/25/2010	2:31:22 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	2:31:22 PM	Tube furnace set to 0
5/25/2010	2:31:22 PM	Run finished at 2:31 PM
5/25/2010	2:31:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2010	2:37:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/25/2010	2:37:09 PM	Recipe started at 2:37 PM
5/25/2010	2:37:09 PM	H2 valve closed
5/25/2010	2:37:09 PM	BCl3 valve closed
5/25/2010	2:37:09 PM	PH3 valve closed
5/25/2010	2:37:10 PM	SiCl4 pre valve closed
5/25/2010	2:37:10 PM	SiCl4 post valve closed
5/25/2010	2:37:10 PM	Main Vac valve closed
5/25/2010	2:37:10 PM	Bypass valve closed
5/25/2010	2:37:10 PM	Bubbler valve closed
5/25/2010	2:37:10 PM	Helium valve opened
5/25/2010	2:37:10 PM	Helium MFC set to  500.000000
5/25/2010	2:37:10 PM	H2 MFC set to  0.000000
5/25/2010	2:37:10 PM	BCl3 MFC set to  0.000000
5/25/2010	2:37:10 PM	SiCl4 MFC set to  0.000000
5/25/2010	2:37:10 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	2:37:10 PM	Tube furnace set to 0
5/25/2010	2:38:31 PM	Helium valve closed
5/25/2010	2:38:31 PM	H2 valve closed
5/25/2010	2:38:31 PM	BCl3 valve closed
5/25/2010	2:38:31 PM	PH3 valve closed
5/25/2010	2:38:31 PM	SiCl4 pre valve closed
5/25/2010	2:38:31 PM	SiCl4 post valve closed
5/25/2010	2:38:31 PM	Main Vac valve closed
5/25/2010	2:38:31 PM	Bypass valve closed
5/25/2010	2:38:31 PM	Bubbler valve closed
5/25/2010	2:38:31 PM	Helium MFC set to  0.000000
5/25/2010	2:38:31 PM	H2 MFC set to  0.000000
5/25/2010	2:38:31 PM	BCl3 MFC set to  0.000000
5/25/2010	2:38:31 PM	SiCl4 MFC set to  0.000000
5/25/2010	2:38:31 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	2:38:31 PM	Tube furnace set to 0
5/25/2010	2:38:46 PM	Helium valve closed
5/25/2010	2:38:46 PM	H2 valve closed
5/25/2010	2:38:46 PM	BCl3 valve closed
5/25/2010	2:38:46 PM	PH3 valve closed
5/25/2010	2:38:46 PM	SiCl4 pre valve closed
5/25/2010	2:38:46 PM	SiCl4 post valve closed
5/25/2010	2:38:46 PM	Main Vac valve closed
5/25/2010	2:38:46 PM	Bubbler valve closed
5/25/2010	2:38:46 PM	Bypass valve opened
5/25/2010	2:38:46 PM	Helium MFC set to  0.000000
5/25/2010	2:38:46 PM	H2 MFC set to  0.000000
5/25/2010	2:38:46 PM	BCl3 MFC set to  0.000000
5/25/2010	2:38:46 PM	SiCl4 MFC set to  0.000000
5/25/2010	2:38:46 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	2:38:46 PM	Tube furnace set to 0
5/25/2010	2:39:19 PM	Helium valve closed
5/25/2010	2:39:19 PM	H2 valve closed
5/25/2010	2:39:19 PM	BCl3 valve closed
5/25/2010	2:39:19 PM	PH3 valve closed
5/25/2010	2:39:19 PM	SiCl4 pre valve closed
5/25/2010	2:39:19 PM	SiCl4 post valve closed
5/25/2010	2:39:19 PM	Bubbler valve closed
5/25/2010	2:39:19 PM	Main Vac valve opened
5/25/2010	2:39:19 PM	Bypass valve opened
5/25/2010	2:39:19 PM	Helium MFC set to  0.000000
5/25/2010	2:39:19 PM	H2 MFC set to  0.000000
5/25/2010	2:39:19 PM	BCl3 MFC set to  0.000000
5/25/2010	2:39:19 PM	SiCl4 MFC set to  0.000000
5/25/2010	2:39:19 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	2:39:19 PM	Tube furnace set to 0
5/25/2010	2:44:19 PM	H2 valve closed
5/25/2010	2:44:19 PM	BCl3 valve closed
5/25/2010	2:44:19 PM	PH3 valve closed
5/25/2010	2:44:19 PM	SiCl4 pre valve closed
5/25/2010	2:44:19 PM	SiCl4 post valve closed
5/25/2010	2:44:19 PM	Main Vac valve closed
5/25/2010	2:44:19 PM	Bypass valve closed
5/25/2010	2:44:19 PM	Bubbler valve closed
5/25/2010	2:44:19 PM	Helium valve opened
5/25/2010	2:44:19 PM	Helium MFC set to  500.000000
5/25/2010	2:44:19 PM	H2 MFC set to  0.000000
5/25/2010	2:44:19 PM	BCl3 MFC set to  0.000000
5/25/2010	2:44:19 PM	SiCl4 MFC set to  0.000000
5/25/2010	2:44:19 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	2:44:19 PM	Tube furnace set to 0
5/25/2010	2:45:40 PM	Helium valve closed
5/25/2010	2:45:40 PM	H2 valve closed
5/25/2010	2:45:40 PM	BCl3 valve closed
5/25/2010	2:45:40 PM	PH3 valve closed
5/25/2010	2:45:40 PM	SiCl4 pre valve closed
5/25/2010	2:45:40 PM	SiCl4 post valve closed
5/25/2010	2:45:40 PM	Main Vac valve closed
5/25/2010	2:45:40 PM	Bypass valve closed
5/25/2010	2:45:40 PM	Bubbler valve closed
5/25/2010	2:45:40 PM	Helium MFC set to  0.000000
5/25/2010	2:45:40 PM	H2 MFC set to  0.000000
5/25/2010	2:45:40 PM	BCl3 MFC set to  0.000000
5/25/2010	2:45:40 PM	SiCl4 MFC set to  0.000000
5/25/2010	2:45:40 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	2:45:40 PM	Tube furnace set to 0
5/25/2010	2:45:55 PM	Helium valve closed
5/25/2010	2:45:55 PM	H2 valve closed
5/25/2010	2:45:55 PM	BCl3 valve closed
5/25/2010	2:45:55 PM	PH3 valve closed
5/25/2010	2:45:55 PM	SiCl4 pre valve closed
5/25/2010	2:45:55 PM	SiCl4 post valve closed
5/25/2010	2:45:55 PM	Main Vac valve closed
5/25/2010	2:45:55 PM	Bubbler valve closed
5/25/2010	2:45:55 PM	Bypass valve opened
5/25/2010	2:45:55 PM	Helium MFC set to  0.000000
5/25/2010	2:45:55 PM	H2 MFC set to  0.000000
5/25/2010	2:45:55 PM	BCl3 MFC set to  0.000000
5/25/2010	2:45:55 PM	SiCl4 MFC set to  0.000000
5/25/2010	2:45:55 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	2:45:56 PM	Tube furnace set to 0
5/25/2010	2:46:28 PM	Helium valve closed
5/25/2010	2:46:28 PM	H2 valve closed
5/25/2010	2:46:28 PM	BCl3 valve closed
5/25/2010	2:46:28 PM	PH3 valve closed
5/25/2010	2:46:28 PM	SiCl4 pre valve closed
5/25/2010	2:46:28 PM	SiCl4 post valve closed
5/25/2010	2:46:28 PM	Bubbler valve closed
5/25/2010	2:46:28 PM	Main Vac valve opened
5/25/2010	2:46:28 PM	Bypass valve opened
5/25/2010	2:46:28 PM	Helium MFC set to  0.000000
5/25/2010	2:46:28 PM	H2 MFC set to  0.000000
5/25/2010	2:46:28 PM	BCl3 MFC set to  0.000000
5/25/2010	2:46:28 PM	SiCl4 MFC set to  0.000000
5/25/2010	2:46:28 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	2:46:28 PM	Tube furnace set to 0
5/25/2010	2:51:28 PM	H2 valve closed
5/25/2010	2:51:28 PM	BCl3 valve closed
5/25/2010	2:51:28 PM	PH3 valve closed
5/25/2010	2:51:28 PM	SiCl4 pre valve closed
5/25/2010	2:51:29 PM	SiCl4 post valve closed
5/25/2010	2:51:29 PM	Main Vac valve closed
5/25/2010	2:51:29 PM	Bypass valve closed
5/25/2010	2:51:29 PM	Bubbler valve closed
5/25/2010	2:51:29 PM	Helium valve opened
5/25/2010	2:51:29 PM	Helium MFC set to  500.000000
5/25/2010	2:51:29 PM	H2 MFC set to  0.000000
5/25/2010	2:51:29 PM	BCl3 MFC set to  0.000000
5/25/2010	2:51:29 PM	SiCl4 MFC set to  0.000000
5/25/2010	2:51:29 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	2:51:29 PM	Tube furnace set to 0
5/25/2010	2:52:50 PM	Helium valve closed
5/25/2010	2:52:50 PM	H2 valve closed
5/25/2010	2:52:50 PM	BCl3 valve closed
5/25/2010	2:52:50 PM	PH3 valve closed
5/25/2010	2:52:50 PM	SiCl4 pre valve closed
5/25/2010	2:52:50 PM	SiCl4 post valve closed
5/25/2010	2:52:50 PM	Main Vac valve closed
5/25/2010	2:52:50 PM	Bypass valve closed
5/25/2010	2:52:50 PM	Bubbler valve closed
5/25/2010	2:52:50 PM	Helium MFC set to  0.000000
5/25/2010	2:52:50 PM	H2 MFC set to  0.000000
5/25/2010	2:52:50 PM	BCl3 MFC set to  0.000000
5/25/2010	2:52:50 PM	SiCl4 MFC set to  0.000000
5/25/2010	2:52:50 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	2:52:50 PM	Tube furnace set to 0
5/25/2010	2:53:05 PM	Helium valve closed
5/25/2010	2:53:05 PM	H2 valve closed
5/25/2010	2:53:05 PM	BCl3 valve closed
5/25/2010	2:53:05 PM	PH3 valve closed
5/25/2010	2:53:05 PM	SiCl4 pre valve closed
5/25/2010	2:53:05 PM	SiCl4 post valve closed
5/25/2010	2:53:05 PM	Main Vac valve closed
5/25/2010	2:53:05 PM	Bubbler valve closed
5/25/2010	2:53:05 PM	Bypass valve opened
5/25/2010	2:53:05 PM	Helium MFC set to  0.000000
5/25/2010	2:53:05 PM	H2 MFC set to  0.000000
5/25/2010	2:53:05 PM	BCl3 MFC set to  0.000000
5/25/2010	2:53:05 PM	SiCl4 MFC set to  0.000000
5/25/2010	2:53:05 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	2:53:06 PM	Tube furnace set to 0
5/25/2010	2:53:38 PM	Helium valve closed
5/25/2010	2:53:38 PM	H2 valve closed
5/25/2010	2:53:38 PM	BCl3 valve closed
5/25/2010	2:53:38 PM	PH3 valve closed
5/25/2010	2:53:38 PM	SiCl4 pre valve closed
5/25/2010	2:53:38 PM	SiCl4 post valve closed
5/25/2010	2:53:38 PM	Bubbler valve closed
5/25/2010	2:53:38 PM	Main Vac valve opened
5/25/2010	2:53:38 PM	Bypass valve opened
5/25/2010	2:53:38 PM	Helium MFC set to  0.000000
5/25/2010	2:53:38 PM	H2 MFC set to  0.000000
5/25/2010	2:53:38 PM	BCl3 MFC set to  0.000000
5/25/2010	2:53:38 PM	SiCl4 MFC set to  0.000000
5/25/2010	2:53:38 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	2:53:38 PM	Tube furnace set to 0
5/25/2010	2:58:38 PM	Helium valve closed
5/25/2010	2:58:38 PM	H2 valve closed
5/25/2010	2:58:38 PM	BCl3 valve closed
5/25/2010	2:58:38 PM	PH3 valve closed
5/25/2010	2:58:38 PM	SiCl4 pre valve closed
5/25/2010	2:58:38 PM	SiCl4 post valve closed
5/25/2010	2:58:38 PM	Bubbler valve closed
5/25/2010	2:58:38 PM	Main Vac valve opened
5/25/2010	2:58:38 PM	Bypass valve opened
5/25/2010	2:58:39 PM	Helium MFC set to  0.000000
5/25/2010	2:58:39 PM	H2 MFC set to  0.000000
5/25/2010	2:58:39 PM	BCl3 MFC set to  0.000000
5/25/2010	2:58:39 PM	SiCl4 MFC set to  0.000000
5/25/2010	2:58:39 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	2:58:39 PM	Tube furnace set to 0
5/25/2010	2:58:40 PM	Run finished at 2:58 PM
5/25/2010	2:58:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/25/2010	3:04:49 PM	Bypass valve closed
5/25/2010	3:04:49 PM	Main Vac valve closed
5/25/2010	3:22:26 PM	Bypass valve opened
5/25/2010	3:22:27 PM	Main Vac valve opened
5/25/2010	3:22:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/25/2010	3:22:48 PM	Recipe started at 3:22 PM
5/25/2010	3:22:48 PM	H2 valve closed
5/25/2010	3:22:48 PM	BCl3 valve closed
5/25/2010	3:22:48 PM	PH3 valve closed
5/25/2010	3:22:48 PM	SiCl4 pre valve closed
5/25/2010	3:22:48 PM	SiCl4 post valve closed
5/25/2010	3:22:48 PM	Main Vac valve closed
5/25/2010	3:22:48 PM	Bypass valve closed
5/25/2010	3:22:48 PM	Bubbler valve closed
5/25/2010	3:22:48 PM	Helium valve opened
5/25/2010	3:22:48 PM	Helium MFC set to  500.000000
5/25/2010	3:22:48 PM	H2 MFC set to  0.000000
5/25/2010	3:22:48 PM	BCl3 MFC set to  0.000000
5/25/2010	3:22:48 PM	SiCl4 MFC set to  0.000000
5/25/2010	3:22:48 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	3:22:48 PM	Tube furnace set to 0
5/25/2010	3:24:10 PM	Helium valve closed
5/25/2010	3:24:10 PM	H2 valve closed
5/25/2010	3:24:10 PM	BCl3 valve closed
5/25/2010	3:24:10 PM	PH3 valve closed
5/25/2010	3:24:10 PM	SiCl4 pre valve closed
5/25/2010	3:24:10 PM	SiCl4 post valve closed
5/25/2010	3:24:10 PM	Main Vac valve closed
5/25/2010	3:24:10 PM	Bypass valve closed
5/25/2010	3:24:10 PM	Bubbler valve closed
5/25/2010	3:24:10 PM	Helium MFC set to  0.000000
5/25/2010	3:24:10 PM	H2 MFC set to  0.000000
5/25/2010	3:24:10 PM	BCl3 MFC set to  0.000000
5/25/2010	3:24:10 PM	SiCl4 MFC set to  0.000000
5/25/2010	3:24:10 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	3:24:10 PM	Tube furnace set to 0
5/25/2010	3:24:25 PM	Helium valve closed
5/25/2010	3:24:25 PM	H2 valve closed
5/25/2010	3:24:25 PM	BCl3 valve closed
5/25/2010	3:24:25 PM	PH3 valve closed
5/25/2010	3:24:25 PM	SiCl4 pre valve closed
5/25/2010	3:24:25 PM	SiCl4 post valve closed
5/25/2010	3:24:25 PM	Main Vac valve closed
5/25/2010	3:24:25 PM	Bubbler valve closed
5/25/2010	3:24:25 PM	Bypass valve opened
5/25/2010	3:24:25 PM	Helium MFC set to  0.000000
5/25/2010	3:24:25 PM	H2 MFC set to  0.000000
5/25/2010	3:24:25 PM	BCl3 MFC set to  0.000000
5/25/2010	3:24:25 PM	SiCl4 MFC set to  0.000000
5/25/2010	3:24:25 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	3:24:25 PM	Tube furnace set to 0
5/25/2010	3:24:58 PM	Helium valve closed
5/25/2010	3:24:58 PM	H2 valve closed
5/25/2010	3:24:58 PM	BCl3 valve closed
5/25/2010	3:24:58 PM	PH3 valve closed
5/25/2010	3:24:58 PM	SiCl4 pre valve closed
5/25/2010	3:24:58 PM	SiCl4 post valve closed
5/25/2010	3:24:58 PM	Bubbler valve closed
5/25/2010	3:24:58 PM	Main Vac valve opened
5/25/2010	3:24:58 PM	Bypass valve opened
5/25/2010	3:24:58 PM	Helium MFC set to  0.000000
5/25/2010	3:24:58 PM	H2 MFC set to  0.000000
5/25/2010	3:24:58 PM	BCl3 MFC set to  0.000000
5/25/2010	3:24:58 PM	SiCl4 MFC set to  0.000000
5/25/2010	3:24:58 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	3:24:58 PM	Tube furnace set to 0
5/25/2010	3:29:58 PM	H2 valve closed
5/25/2010	3:29:58 PM	BCl3 valve closed
5/25/2010	3:29:58 PM	PH3 valve closed
5/25/2010	3:29:58 PM	SiCl4 pre valve closed
5/25/2010	3:29:58 PM	SiCl4 post valve closed
5/25/2010	3:29:58 PM	Main Vac valve closed
5/25/2010	3:29:58 PM	Bypass valve closed
5/25/2010	3:29:58 PM	Bubbler valve closed
5/25/2010	3:29:58 PM	Helium valve opened
5/25/2010	3:29:58 PM	Helium MFC set to  500.000000
5/25/2010	3:29:58 PM	H2 MFC set to  0.000000
5/25/2010	3:29:58 PM	BCl3 MFC set to  0.000000
5/25/2010	3:29:58 PM	SiCl4 MFC set to  0.000000
5/25/2010	3:29:58 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	3:29:58 PM	Tube furnace set to 0
5/25/2010	3:31:20 PM	Helium valve closed
5/25/2010	3:31:20 PM	H2 valve closed
5/25/2010	3:31:20 PM	BCl3 valve closed
5/25/2010	3:31:20 PM	PH3 valve closed
5/25/2010	3:31:20 PM	SiCl4 pre valve closed
5/25/2010	3:31:20 PM	SiCl4 post valve closed
5/25/2010	3:31:20 PM	Main Vac valve closed
5/25/2010	3:31:20 PM	Bypass valve closed
5/25/2010	3:31:20 PM	Bubbler valve closed
5/25/2010	3:31:20 PM	Helium MFC set to  0.000000
5/25/2010	3:31:20 PM	H2 MFC set to  0.000000
5/25/2010	3:31:20 PM	BCl3 MFC set to  0.000000
5/25/2010	3:31:20 PM	SiCl4 MFC set to  0.000000
5/25/2010	3:31:20 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	3:31:20 PM	Tube furnace set to 0
5/25/2010	3:31:35 PM	Helium valve closed
5/25/2010	3:31:35 PM	H2 valve closed
5/25/2010	3:31:35 PM	BCl3 valve closed
5/25/2010	3:31:35 PM	PH3 valve closed
5/25/2010	3:31:35 PM	SiCl4 pre valve closed
5/25/2010	3:31:35 PM	SiCl4 post valve closed
5/25/2010	3:31:35 PM	Main Vac valve closed
5/25/2010	3:31:35 PM	Bubbler valve closed
5/25/2010	3:31:35 PM	Bypass valve opened
5/25/2010	3:31:35 PM	Helium MFC set to  0.000000
5/25/2010	3:31:35 PM	H2 MFC set to  0.000000
5/25/2010	3:31:35 PM	BCl3 MFC set to  0.000000
5/25/2010	3:31:35 PM	SiCl4 MFC set to  0.000000
5/25/2010	3:31:35 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	3:31:35 PM	Tube furnace set to 0
5/25/2010	3:32:08 PM	Helium valve closed
5/25/2010	3:32:08 PM	H2 valve closed
5/25/2010	3:32:08 PM	BCl3 valve closed
5/25/2010	3:32:08 PM	PH3 valve closed
5/25/2010	3:32:08 PM	SiCl4 pre valve closed
5/25/2010	3:32:08 PM	SiCl4 post valve closed
5/25/2010	3:32:08 PM	Bubbler valve closed
5/25/2010	3:32:08 PM	Main Vac valve opened
5/25/2010	3:32:08 PM	Bypass valve opened
5/25/2010	3:32:08 PM	Helium MFC set to  0.000000
5/25/2010	3:32:08 PM	H2 MFC set to  0.000000
5/25/2010	3:32:08 PM	BCl3 MFC set to  0.000000
5/25/2010	3:32:08 PM	SiCl4 MFC set to  0.000000
5/25/2010	3:32:08 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	3:32:08 PM	Tube furnace set to 0
5/25/2010	3:37:08 PM	H2 valve closed
5/25/2010	3:37:08 PM	BCl3 valve closed
5/25/2010	3:37:08 PM	PH3 valve closed
5/25/2010	3:37:08 PM	SiCl4 pre valve closed
5/25/2010	3:37:08 PM	SiCl4 post valve closed
5/25/2010	3:37:08 PM	Main Vac valve closed
5/25/2010	3:37:08 PM	Bypass valve closed
5/25/2010	3:37:08 PM	Bubbler valve closed
5/25/2010	3:37:08 PM	Helium valve opened
5/25/2010	3:37:08 PM	Helium MFC set to  500.000000
5/25/2010	3:37:08 PM	H2 MFC set to  0.000000
5/25/2010	3:37:08 PM	BCl3 MFC set to  0.000000
5/25/2010	3:37:08 PM	SiCl4 MFC set to  0.000000
5/25/2010	3:37:08 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	3:37:08 PM	Tube furnace set to 0
5/25/2010	3:38:29 PM	Helium valve closed
5/25/2010	3:38:29 PM	H2 valve closed
5/25/2010	3:38:29 PM	BCl3 valve closed
5/25/2010	3:38:29 PM	PH3 valve closed
5/25/2010	3:38:29 PM	SiCl4 pre valve closed
5/25/2010	3:38:29 PM	SiCl4 post valve closed
5/25/2010	3:38:29 PM	Main Vac valve closed
5/25/2010	3:38:29 PM	Bypass valve closed
5/25/2010	3:38:29 PM	Bubbler valve closed
5/25/2010	3:38:29 PM	Helium MFC set to  0.000000
5/25/2010	3:38:29 PM	H2 MFC set to  0.000000
5/25/2010	3:38:29 PM	BCl3 MFC set to  0.000000
5/25/2010	3:38:29 PM	SiCl4 MFC set to  0.000000
5/25/2010	3:38:29 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	3:38:29 PM	Tube furnace set to 0
5/25/2010	3:38:44 PM	Helium valve closed
5/25/2010	3:38:44 PM	H2 valve closed
5/25/2010	3:38:44 PM	BCl3 valve closed
5/25/2010	3:38:44 PM	PH3 valve closed
5/25/2010	3:38:44 PM	SiCl4 pre valve closed
5/25/2010	3:38:44 PM	SiCl4 post valve closed
5/25/2010	3:38:44 PM	Main Vac valve closed
5/25/2010	3:38:44 PM	Bubbler valve closed
5/25/2010	3:38:44 PM	Bypass valve opened
5/25/2010	3:38:44 PM	Helium MFC set to  0.000000
5/25/2010	3:38:44 PM	H2 MFC set to  0.000000
5/25/2010	3:38:44 PM	BCl3 MFC set to  0.000000
5/25/2010	3:38:44 PM	SiCl4 MFC set to  0.000000
5/25/2010	3:38:44 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	3:38:44 PM	Tube furnace set to 0
5/25/2010	3:39:17 PM	Helium valve closed
5/25/2010	3:39:17 PM	H2 valve closed
5/25/2010	3:39:17 PM	BCl3 valve closed
5/25/2010	3:39:17 PM	PH3 valve closed
5/25/2010	3:39:17 PM	SiCl4 pre valve closed
5/25/2010	3:39:17 PM	SiCl4 post valve closed
5/25/2010	3:39:17 PM	Bubbler valve closed
5/25/2010	3:39:17 PM	Main Vac valve opened
5/25/2010	3:39:17 PM	Bypass valve opened
5/25/2010	3:39:17 PM	Helium MFC set to  0.000000
5/25/2010	3:39:17 PM	H2 MFC set to  0.000000
5/25/2010	3:39:17 PM	BCl3 MFC set to  0.000000
5/25/2010	3:39:17 PM	SiCl4 MFC set to  0.000000
5/25/2010	3:39:17 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	3:39:17 PM	Tube furnace set to 0
5/25/2010	3:44:17 PM	Helium valve closed
5/25/2010	3:44:17 PM	H2 valve closed
5/25/2010	3:44:17 PM	BCl3 valve closed
5/25/2010	3:44:17 PM	PH3 valve closed
5/25/2010	3:44:17 PM	SiCl4 pre valve closed
5/25/2010	3:44:17 PM	SiCl4 post valve closed
5/25/2010	3:44:17 PM	Bubbler valve closed
5/25/2010	3:44:17 PM	Main Vac valve opened
5/25/2010	3:44:17 PM	Bypass valve opened
5/25/2010	3:44:17 PM	Helium MFC set to  0.000000
5/25/2010	3:44:17 PM	H2 MFC set to  0.000000
5/25/2010	3:44:17 PM	BCl3 MFC set to  0.000000
5/25/2010	3:44:17 PM	SiCl4 MFC set to  0.000000
5/25/2010	3:44:17 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	3:44:18 PM	Tube furnace set to 0
5/25/2010	3:44:19 PM	Run finished at 3:44 PM
5/25/2010	3:44:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/25/2010	3:51:59 PM	Bypass valve closed
5/25/2010	3:51:59 PM	Main Vac valve closed
5/25/2010	3:52:09 PM	Main Vac valve opened
5/25/2010	3:52:10 PM	Bypass valve opened
5/25/2010	3:53:53 PM	Recipe started at 3:53 PM
5/25/2010	3:53:53 PM	Helium valve closed
5/25/2010	3:53:53 PM	BCl3 valve closed
5/25/2010	3:53:53 PM	PH3 valve closed
5/25/2010	3:53:53 PM	SiCl4 pre valve closed
5/25/2010	3:53:53 PM	SiCl4 post valve closed
5/25/2010	3:53:53 PM	Main Vac valve closed
5/25/2010	3:53:53 PM	Bypass valve closed
5/25/2010	3:53:53 PM	Bubbler valve closed
5/25/2010	3:53:53 PM	H2 valve opened
5/25/2010	3:53:53 PM	Helium MFC set to  0.000000
5/25/2010	3:53:53 PM	H2 MFC set to  500.000000
5/25/2010	3:53:53 PM	BCl3 MFC set to  0.000000
5/25/2010	3:53:53 PM	SiCl4 MFC set to  0.000000
5/25/2010	3:53:53 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	3:53:53 PM	Tube furnace set to 0
5/25/2010	3:55:14 PM	Helium valve closed
5/25/2010	3:55:14 PM	BCl3 valve closed
5/25/2010	3:55:14 PM	PH3 valve closed
5/25/2010	3:55:14 PM	SiCl4 pre valve closed
5/25/2010	3:55:14 PM	SiCl4 post valve closed
5/25/2010	3:55:15 PM	Main Vac valve closed
5/25/2010	3:55:15 PM	Bypass valve closed
5/25/2010	3:55:15 PM	H2 valve opened
5/25/2010	3:55:15 PM	Bubbler valve opened
5/25/2010	3:55:15 PM	Helium MFC set to  0.000000
5/25/2010	3:55:15 PM	H2 MFC set to  500.000000
5/25/2010	3:55:15 PM	BCl3 MFC set to  0.000000
5/25/2010	3:55:15 PM	SiCl4 MFC set to  0.000000
5/25/2010	3:55:15 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	3:55:15 PM	Tube furnace set to 1000
5/25/2010	4:15:15 PM	Helium valve closed
5/25/2010	4:15:15 PM	PH3 valve closed
5/25/2010	4:15:15 PM	Main Vac valve closed
5/25/2010	4:15:15 PM	Bypass valve closed
5/25/2010	4:15:15 PM	H2 valve opened
5/25/2010	4:15:15 PM	BCl3 valve opened
5/25/2010	4:15:15 PM	SiCl4 pre valve opened
5/25/2010	4:15:15 PM	SiCl4 post valve opened
5/25/2010	4:15:15 PM	Bubbler valve opened
5/25/2010	4:15:15 PM	Helium MFC set to  0.000000
5/25/2010	4:15:15 PM	H2 MFC set to  500.000000
5/25/2010	4:15:15 PM	BCl3 MFC set to  35.000000
5/25/2010	4:15:15 PM	SiCl4 MFC set to  500.000000
5/25/2010	4:15:15 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	4:15:15 PM	Tube furnace set to 1000
5/25/2010	4:24:24 PM	H2 valve closed
5/25/2010	4:24:24 PM	BCl3 valve closed
5/25/2010	4:24:24 PM	PH3 valve closed
5/25/2010	4:24:24 PM	SiCl4 pre valve closed
5/25/2010	4:24:24 PM	SiCl4 post valve closed
5/25/2010	4:24:24 PM	Main Vac valve closed
5/25/2010	4:24:24 PM	Bypass valve closed
5/25/2010	4:24:24 PM	Helium valve opened
5/25/2010	4:24:24 PM	Bubbler valve opened
5/25/2010	4:24:24 PM	Helium MFC set to  500.000000
5/25/2010	4:24:24 PM	H2 MFC set to  0.000000
5/25/2010	4:24:24 PM	BCl3 MFC set to  0.000000
5/25/2010	4:24:24 PM	SiCl4 MFC set to  0.000000
5/25/2010	4:24:24 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	4:24:24 PM	Tube furnace set to 0
5/25/2010	4:39:37 PM	Helium valve closed
5/25/2010	4:39:37 PM	H2 valve closed
5/25/2010	4:39:37 PM	BCl3 valve closed
5/25/2010	4:39:37 PM	PH3 valve closed
5/25/2010	4:39:38 PM	SiCl4 pre valve closed
5/25/2010	4:39:38 PM	SiCl4 post valve closed
5/25/2010	4:39:38 PM	Main Vac valve closed
5/25/2010	4:39:38 PM	Bypass valve closed
5/25/2010	4:39:38 PM	Bubbler valve closed
5/25/2010	4:39:38 PM	Helium MFC set to  0.000000
5/25/2010	4:39:38 PM	H2 MFC set to  0.000000
5/25/2010	4:39:38 PM	BCl3 MFC set to  0.000000
5/25/2010	4:39:38 PM	SiCl4 MFC set to  0.000000
5/25/2010	4:39:38 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	4:39:38 PM	Tube furnace set to 0
5/25/2010	4:39:38 PM	Run finished at 4:39 PM
5/25/2010	4:39:57 PM	Program exited cleanly
5/25/2010	4:43:34 PM	Program started normally
5/25/2010	4:43:34 PM	Helium valve closed
5/25/2010	4:43:34 PM	H2 valve closed
5/25/2010	4:43:34 PM	BCl3 valve closed
5/25/2010	4:43:34 PM	PH3 valve closed
5/25/2010	4:43:34 PM	SiCl4 pre valve closed
5/25/2010	4:43:34 PM	SiCl4 post valve closed
5/25/2010	4:43:34 PM	Main Vac valve closed
5/25/2010	4:43:34 PM	Bypass valve closed
5/25/2010	4:43:34 PM	Bubbler valve closed
5/25/2010	4:43:34 PM	Helium MFC set to  0.000000
5/25/2010	4:43:34 PM	H2 MFC set to  0.000000
5/25/2010	4:43:34 PM	BCl3 MFC set to  0.000000
5/25/2010	4:43:34 PM	PHl3 MFC set to  0.000000
5/25/2010	4:43:34 PM	SiCl4 MFC set to  0.000000
5/25/2010	4:43:34 PM	Bypass solenoid MFC set to  760.000000
5/25/2010	4:43:35 PM	Tube furnace set to 0
5/25/2010	4:43:41 PM	PHl3 MFC set to  1.000000
5/25/2010	4:44:07 PM	PHl3 MFC set to  20.000000
5/25/2010	4:44:16 PM	PHl3 MFC set to  0.000000
5/25/2010	4:44:20 PM	Program exited cleanly
5/25/2010	4:45:12 PM	Program started normally
5/25/2010	4:45:12 PM	Helium valve closed
5/25/2010	4:45:12 PM	H2 valve closed
5/25/2010	4:45:12 PM	BCl3 valve closed
5/25/2010	4:45:12 PM	PH3 valve closed
5/25/2010	4:45:12 PM	SiCl4 pre valve closed
5/25/2010	4:45:12 PM	SiCl4 post valve closed
5/25/2010	4:45:12 PM	Main Vac valve closed
5/25/2010	4:45:12 PM	Bypass valve closed
5/25/2010	4:45:12 PM	Bubbler valve closed
5/25/2010	4:45:12 PM	Helium MFC set to  0.000000
5/25/2010	4:45:12 PM	H2 MFC set to  0.000000
5/25/2010	4:45:12 PM	BCl3 MFC set to  0.000000
5/25/2010	4:45:12 PM	PHl3 MFC set to  0.000000
5/25/2010	4:45:12 PM	SiCl4 MFC set to  0.000000
5/25/2010	4:45:12 PM	Bypass solenoid MFC set to  760.000000
5/25/2010	4:45:12 PM	Tube furnace set to 0
5/25/2010	4:45:21 PM	PHl3 MFC set to  20.000000
5/25/2010	4:45:26 PM	PHl3 MFC set to  0.000000
5/25/2010	4:45:33 PM	Program exited cleanly
5/25/2010	4:47:33 PM	Program started normally
5/25/2010	4:47:33 PM	Helium valve closed
5/25/2010	4:47:33 PM	H2 valve closed
5/25/2010	4:47:33 PM	BCl3 valve closed
5/25/2010	4:47:33 PM	PH3 valve closed
5/25/2010	4:47:33 PM	SiCl4 pre valve closed
5/25/2010	4:47:33 PM	SiCl4 post valve closed
5/25/2010	4:47:33 PM	Main Vac valve closed
5/25/2010	4:47:33 PM	Bypass valve closed
5/25/2010	4:47:33 PM	Bubbler valve closed
5/25/2010	4:47:33 PM	Helium MFC set to  0.000000
5/25/2010	4:47:33 PM	H2 MFC set to  0.000000
5/25/2010	4:47:33 PM	BCl3 MFC set to  0.000000
5/25/2010	4:47:33 PM	Error setting the  PHl3 MFC to 0.000000
5/25/2010	4:47:34 PM	SiCl4 MFC set to  0.000000
5/25/2010	4:47:34 PM	Bypass solenoid MFC set to  760.000000
5/25/2010	4:47:35 PM	Tube furnace set to 0
5/25/2010	4:47:48 PM	Error setting the  PHl3 MFC to 10.000000
5/25/2010	4:48:00 PM	Program exited cleanly
5/25/2010	4:48:04 PM	Program started normally
5/25/2010	4:48:04 PM	Helium valve closed
5/25/2010	4:48:04 PM	H2 valve closed
5/25/2010	4:48:04 PM	BCl3 valve closed
5/25/2010	4:48:04 PM	PH3 valve closed
5/25/2010	4:48:04 PM	SiCl4 pre valve closed
5/25/2010	4:48:04 PM	SiCl4 post valve closed
5/25/2010	4:48:04 PM	Main Vac valve closed
5/25/2010	4:48:04 PM	Bypass valve closed
5/25/2010	4:48:04 PM	Bubbler valve closed
5/25/2010	4:48:04 PM	Helium MFC set to  0.000000
5/25/2010	4:48:04 PM	H2 MFC set to  0.000000
5/25/2010	4:48:04 PM	BCl3 MFC set to  0.000000
5/25/2010	4:48:04 PM	PHl3 MFC set to  0.000000
5/25/2010	4:48:04 PM	SiCl4 MFC set to  0.000000
5/25/2010	4:48:04 PM	Bypass solenoid MFC set to  760.000000
5/25/2010	4:48:04 PM	Tube furnace set to 0
5/25/2010	4:48:10 PM	Error setting the  PHl3 MFC to 20.000000
5/25/2010	4:48:17 PM	Program exited cleanly
5/25/2010	4:48:38 PM	Program started normally
5/25/2010	4:48:38 PM	Helium valve closed
5/25/2010	4:48:38 PM	H2 valve closed
5/25/2010	4:48:38 PM	BCl3 valve closed
5/25/2010	4:48:38 PM	PH3 valve closed
5/25/2010	4:48:38 PM	SiCl4 pre valve closed
5/25/2010	4:48:38 PM	SiCl4 post valve closed
5/25/2010	4:48:38 PM	Main Vac valve closed
5/25/2010	4:48:38 PM	Bypass valve closed
5/25/2010	4:48:38 PM	Bubbler valve closed
5/25/2010	4:48:38 PM	Helium MFC set to  0.000000
5/25/2010	4:48:38 PM	H2 MFC set to  0.000000
5/25/2010	4:48:38 PM	BCl3 MFC set to  0.000000
5/25/2010	4:48:38 PM	PHl3 MFC set to  0.000000
5/25/2010	4:48:38 PM	SiCl4 MFC set to  0.000000
5/25/2010	4:48:38 PM	Bypass solenoid MFC set to  760.000000
5/25/2010	4:48:39 PM	Tube furnace set to 0
5/25/2010	4:48:46 PM	Error setting the  PHl3 MFC to 20.000000
5/25/2010	4:48:52 PM	Program exited cleanly
5/25/2010	4:51:34 PM	Program started normally
5/25/2010	4:51:36 PM	Helium valve closed
5/25/2010	4:51:36 PM	H2 valve closed
5/25/2010	4:51:36 PM	BCl3 valve closed
5/25/2010	4:51:36 PM	PH3 valve closed
5/25/2010	4:51:37 PM	SiCl4 pre valve closed
5/25/2010	4:51:37 PM	SiCl4 post valve closed
5/25/2010	4:51:37 PM	Main Vac valve closed
5/25/2010	4:51:37 PM	Bypass valve closed
5/25/2010	4:51:37 PM	Bubbler valve closed
5/25/2010	4:51:37 PM	Helium MFC set to  0.000000
5/25/2010	4:51:37 PM	H2 MFC set to  0.000000
5/25/2010	4:51:37 PM	BCl3 MFC set to  0.000000
5/25/2010	4:51:37 PM	PHl3 MFC set to  0.000000
5/25/2010	4:51:37 PM	SiCl4 MFC set to  0.000000
5/25/2010	4:51:37 PM	Bypass solenoid MFC set to  760.000000
5/25/2010	4:51:37 PM	Tube furnace set to 0
5/25/2010	4:51:45 PM	Error setting the  PHl3 MFC to 20.000000
5/25/2010	4:51:55 PM	Program exited cleanly
5/25/2010	4:54:01 PM	Program started normally
5/25/2010	4:54:01 PM	Helium valve closed
5/25/2010	4:54:01 PM	H2 valve closed
5/25/2010	4:54:01 PM	BCl3 valve closed
5/25/2010	4:54:01 PM	PH3 valve closed
5/25/2010	4:54:01 PM	SiCl4 pre valve closed
5/25/2010	4:54:01 PM	SiCl4 post valve closed
5/25/2010	4:54:01 PM	Main Vac valve closed
5/25/2010	4:54:01 PM	Bypass valve closed
5/25/2010	4:54:01 PM	Bubbler valve closed
5/25/2010	4:54:01 PM	Helium MFC set to  0.000000
5/25/2010	4:54:01 PM	H2 MFC set to  0.000000
5/25/2010	4:54:01 PM	BCl3 MFC set to  0.000000
5/25/2010	4:54:01 PM	PHl3 MFC set to  0.000000
5/25/2010	4:54:01 PM	SiCl4 MFC set to  0.000000
5/25/2010	4:54:01 PM	Bypass solenoid MFC set to  760.000000
5/25/2010	4:54:02 PM	Tube furnace set to 0
5/25/2010	4:54:07 PM	PHl3 MFC set to  10.000000
5/25/2010	4:54:16 PM	PHl3 MFC set to  5.000000
5/25/2010	4:54:24 PM	PHl3 MFC set to  2.500000
5/25/2010	4:54:30 PM	Program exited cleanly
5/25/2010	4:54:47 PM	Program started normally
5/25/2010	4:54:47 PM	Helium valve closed
5/25/2010	4:54:47 PM	H2 valve closed
5/25/2010	4:54:47 PM	BCl3 valve closed
5/25/2010	4:54:47 PM	PH3 valve closed
5/25/2010	4:54:47 PM	SiCl4 pre valve closed
5/25/2010	4:54:47 PM	SiCl4 post valve closed
5/25/2010	4:54:47 PM	Main Vac valve closed
5/25/2010	4:54:47 PM	Bypass valve closed
5/25/2010	4:54:47 PM	Bubbler valve closed
5/25/2010	4:54:47 PM	Helium MFC set to  0.000000
5/25/2010	4:54:47 PM	H2 MFC set to  0.000000
5/25/2010	4:54:47 PM	BCl3 MFC set to  0.000000
5/25/2010	4:54:47 PM	PHl3 MFC set to  0.000000
5/25/2010	4:54:47 PM	SiCl4 MFC set to  0.000000
5/25/2010	4:54:47 PM	Bypass solenoid MFC set to  760.000000
5/25/2010	4:54:47 PM	Tube furnace set to 0
5/25/2010	4:54:55 PM	PHl3 MFC set to  13.600000
5/25/2010	4:55:03 PM	PHl3 MFC set to  0.000000
5/25/2010	4:55:11 PM	PHl3 MFC set to  20.000000
5/25/2010	4:55:18 PM	PHl3 MFC set to  0.000000
5/25/2010	4:55:36 PM	SiCl4 MFC set to  500.000000
5/25/2010	4:56:07 PM	Program exited cleanly
5/25/2010	4:57:00 PM	Program started normally
5/25/2010	4:57:00 PM	Helium valve closed
5/25/2010	4:57:00 PM	H2 valve closed
5/25/2010	4:57:00 PM	BCl3 valve closed
5/25/2010	4:57:00 PM	PH3 valve closed
5/25/2010	4:57:00 PM	SiCl4 pre valve closed
5/25/2010	4:57:00 PM	SiCl4 post valve closed
5/25/2010	4:57:00 PM	Main Vac valve closed
5/25/2010	4:57:00 PM	Bypass valve closed
5/25/2010	4:57:00 PM	Bubbler valve closed
5/25/2010	4:57:00 PM	Helium MFC set to  0.000000
5/25/2010	4:57:00 PM	H2 MFC set to  0.000000
5/25/2010	4:57:00 PM	BCl3 MFC set to  0.000000
5/25/2010	4:57:00 PM	PHl3 MFC set to  0.000000
5/25/2010	4:57:00 PM	SiCl4 MFC set to  0.000000
5/25/2010	4:57:00 PM	Bypass solenoid MFC set to  760.000000
5/25/2010	4:57:01 PM	Tube furnace set to 0
5/25/2010	4:57:09 PM	SiCl4 MFC set to  10.000000
5/25/2010	4:57:27 PM	SiCl4 MFC set to  50.000000
5/25/2010	4:57:33 PM	SiCl4 MFC set to  0.000000
5/25/2010	4:57:56 PM	Program exited cleanly
5/25/2010	4:58:37 PM	Program started normally
5/25/2010	4:58:37 PM	Helium valve closed
5/25/2010	4:58:37 PM	H2 valve closed
5/25/2010	4:58:37 PM	BCl3 valve closed
5/25/2010	4:58:37 PM	PH3 valve closed
5/25/2010	4:58:37 PM	SiCl4 pre valve closed
5/25/2010	4:58:37 PM	SiCl4 post valve closed
5/25/2010	4:58:37 PM	Main Vac valve closed
5/25/2010	4:58:37 PM	Bypass valve closed
5/25/2010	4:58:37 PM	Bubbler valve closed
5/25/2010	4:58:37 PM	Helium MFC set to  0.000000
5/25/2010	4:58:37 PM	H2 MFC set to  0.000000
5/25/2010	4:58:37 PM	BCl3 MFC set to  0.000000
5/25/2010	4:58:37 PM	PHl3 MFC set to  0.000000
5/25/2010	4:58:37 PM	SiCl4 MFC set to  0.000000
5/25/2010	4:58:37 PM	Bypass solenoid MFC set to  760.000000
5/25/2010	4:58:37 PM	Tube furnace set to 0
5/25/2010	4:58:46 PM	SiCl4 MFC set to  100.000000
5/25/2010	4:58:55 PM	SiCl4 MFC set to  0.000000
5/25/2010	4:59:00 PM	Program exited cleanly
5/25/2010	5:24:29 PM	Program started normally
5/25/2010	5:24:29 PM	Helium valve closed
5/25/2010	5:24:29 PM	H2 valve closed
5/25/2010	5:24:29 PM	BCl3 valve closed
5/25/2010	5:24:29 PM	PH3 valve closed
5/25/2010	5:24:29 PM	SiCl4 pre valve closed
5/25/2010	5:24:29 PM	SiCl4 post valve closed
5/25/2010	5:24:29 PM	Main Vac valve closed
5/25/2010	5:24:29 PM	Bypass valve closed
5/25/2010	5:24:29 PM	Bubbler valve closed
5/25/2010	5:24:29 PM	Helium MFC set to  0.000000
5/25/2010	5:24:29 PM	H2 MFC set to  0.000000
5/25/2010	5:24:29 PM	BCl3 MFC set to  0.000000
5/25/2010	5:24:29 PM	PHl3 MFC set to  0.000000
5/25/2010	5:24:29 PM	SiCl4 MFC set to  0.000000
5/25/2010	5:24:29 PM	Bypass solenoid MFC set to  760.000000
5/25/2010	5:24:30 PM	Tube furnace set to 0
5/25/2010	5:24:38 PM	SiCl4 MFC set to  100.000000
5/25/2010	5:25:07 PM	SiCl4 MFC set to  0.000000
5/25/2010	5:25:32 PM	BCl3 MFC set to  100.000000
5/25/2010	5:25:41 PM	BCl3 MFC set to  100.000000
5/25/2010	5:25:56 PM	Program exited cleanly
5/25/2010	5:27:54 PM	Program started normally
5/25/2010	5:27:54 PM	Helium valve closed
5/25/2010	5:27:54 PM	H2 valve closed
5/25/2010	5:27:54 PM	BCl3 valve closed
5/25/2010	5:27:54 PM	PH3 valve closed
5/25/2010	5:27:54 PM	SiCl4 pre valve closed
5/25/2010	5:27:54 PM	SiCl4 post valve closed
5/25/2010	5:27:54 PM	Main Vac valve closed
5/25/2010	5:27:54 PM	Bypass valve closed
5/25/2010	5:27:54 PM	Bubbler valve closed
5/25/2010	5:27:54 PM	Helium MFC set to  0.000000
5/25/2010	5:27:54 PM	H2 MFC set to  0.000000
5/25/2010	5:27:54 PM	BCl3 MFC set to  0.000000
5/25/2010	5:27:54 PM	PHl3 MFC set to  0.000000
5/25/2010	5:27:54 PM	SiCl4 MFC set to  0.000000
5/25/2010	5:27:54 PM	Bypass solenoid MFC set to  760.000000
5/25/2010	5:27:54 PM	Tube furnace set to 0
5/25/2010	5:28:05 PM	BCl3 MFC set to  100.000000
5/25/2010	5:28:12 PM	BCl3 MFC set to  0.000000
5/25/2010	5:35:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2010	5:35:13 PM	Recipe started at 5:35 PM
5/25/2010	5:35:13 PM	Helium valve closed
5/25/2010	5:35:13 PM	H2 valve closed
5/25/2010	5:35:13 PM	BCl3 valve closed
5/25/2010	5:35:13 PM	PH3 valve closed
5/25/2010	5:35:13 PM	SiCl4 pre valve closed
5/25/2010	5:35:13 PM	SiCl4 post valve closed
5/25/2010	5:35:13 PM	Main Vac valve closed
5/25/2010	5:35:13 PM	Bubbler valve closed
5/25/2010	5:35:13 PM	Bypass valve opened
5/25/2010	5:35:13 PM	Helium MFC set to  0.000000
5/25/2010	5:35:13 PM	H2 MFC set to  0.000000
5/25/2010	5:35:13 PM	BCl3 MFC set to  0.000000
5/25/2010	5:35:13 PM	PHl3 MFC set to  0.000000
5/25/2010	5:35:13 PM	SiCl4 MFC set to  0.000000
5/25/2010	5:35:13 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	5:35:13 PM	Tube furnace set to 0
5/25/2010	5:36:01 PM	Helium valve closed
5/25/2010	5:36:01 PM	H2 valve closed
5/25/2010	5:36:01 PM	BCl3 valve closed
5/25/2010	5:36:01 PM	PH3 valve closed
5/25/2010	5:36:01 PM	SiCl4 pre valve closed
5/25/2010	5:36:01 PM	SiCl4 post valve closed
5/25/2010	5:36:01 PM	Bubbler valve closed
5/25/2010	5:36:01 PM	Main Vac valve opened
5/25/2010	5:36:01 PM	Bypass valve opened
5/25/2010	5:36:01 PM	Helium MFC set to  0.000000
5/25/2010	5:36:01 PM	H2 MFC set to  0.000000
5/25/2010	5:36:01 PM	BCl3 MFC set to  0.000000
5/25/2010	5:36:01 PM	PHl3 MFC set to  0.000000
5/25/2010	5:36:01 PM	SiCl4 MFC set to  0.000000
5/25/2010	5:36:01 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	5:36:01 PM	Tube furnace set to 0
5/25/2010	5:36:01 PM	Run finished at 5:36 PM
5/25/2010	5:36:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2010	5:38:43 PM	Tube furnace set to 1000
5/25/2010	5:39:22 PM	Helium MFC set to  0.000000
5/25/2010	5:39:33 PM	Tube furnace set to 100
5/25/2010	5:39:50 PM	PH3 valve opened
5/25/2010	5:39:55 PM	PHl3 MFC set to  20.000000
5/25/2010	5:42:27 PM	PH3 valve closed
5/25/2010	5:42:30 PM	PHl3 MFC set to  0.000000
5/25/2010	6:10:31 PM	Helium MFC set to  500.000000
5/25/2010	6:10:34 PM	Bypass valve closed
5/25/2010	6:10:34 PM	Main Vac valve closed
5/25/2010	6:10:37 PM	Helium valve opened
5/25/2010	6:11:58 PM	Bubbler valve opened
5/25/2010	6:13:22 PM	Tube furnace set to 1000
5/25/2010	6:13:25 PM	H2 MFC set to  500.000000
5/25/2010	6:13:28 PM	H2 valve opened
5/25/2010	6:13:28 PM	Helium valve closed
5/25/2010	6:16:33 PM	SiCl4 MFC set to  50.000000
5/25/2010	6:16:40 PM	PHl3 MFC set to  1.000000
5/25/2010	6:26:22 PM	SiCl4 pre valve opened
5/25/2010	6:26:22 PM	SiCl4 post valve opened
5/25/2010	6:26:56 PM	PH3 valve opened
5/25/2010	6:26:56 PM	PH3 valve closed
5/25/2010	6:26:59 PM	PH3 valve opened
5/25/2010	6:27:03 PM	PH3 valve closed
5/25/2010	6:27:41 PM	PH3 valve opened
5/25/2010	6:28:58 PM	PHl3 MFC set to  2.000000
5/25/2010	6:30:32 PM	PHl3 MFC set to  5.000000
5/25/2010	6:31:45 PM	PHl3 MFC set to  10.000000
5/25/2010	6:33:07 PM	PHl3 MFC set to  15.000000
5/25/2010	6:34:09 PM	PHl3 MFC set to  20.000000
5/25/2010	6:40:19 PM	PH3 valve closed
5/25/2010	6:40:23 PM	PHl3 MFC set to  0.000000
5/25/2010	6:42:55 PM	PH3 valve opened
5/25/2010	6:42:56 PM	PH3 valve closed
5/25/2010	6:45:24 PM	SiCl4 post valve closed
5/25/2010	6:45:25 PM	SiCl4 pre valve closed
5/25/2010	6:45:28 PM	SiCl4 MFC set to  0.000000
5/25/2010	6:45:30 PM	Helium valve opened
5/25/2010	6:45:32 PM	H2 valve closed
5/25/2010	6:46:14 PM	Tube furnace set to 0
5/25/2010	6:57:42 PM	Helium valve closed
5/25/2010	6:57:44 PM	H2 MFC set to  500.000000
5/25/2010	6:57:45 PM	Bubbler valve closed
5/25/2010	6:57:52 PM	H2 MFC set to  0.000000
5/25/2010	6:57:53 PM	Helium valve opened
5/25/2010	6:57:55 PM	Bubbler valve opened
5/25/2010	6:58:01 PM	Bubbler valve closed
5/25/2010	6:58:02 PM	Helium valve closed
5/25/2010	6:58:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/25/2010	6:58:57 PM	Recipe started at 6:58 PM
5/25/2010	6:58:57 PM	Helium valve closed
5/25/2010	6:58:57 PM	H2 valve closed
5/25/2010	6:58:57 PM	BCl3 valve closed
5/25/2010	6:58:57 PM	PH3 valve closed
5/25/2010	6:58:57 PM	SiCl4 pre valve closed
5/25/2010	6:58:57 PM	SiCl4 post valve closed
5/25/2010	6:58:57 PM	Main Vac valve closed
5/25/2010	6:58:57 PM	Bubbler valve closed
5/25/2010	6:58:57 PM	Bypass valve opened
5/25/2010	6:58:57 PM	Helium MFC set to  0.000000
5/25/2010	6:58:57 PM	H2 MFC set to  0.000000
5/25/2010	6:58:57 PM	BCl3 MFC set to  0.000000
5/25/2010	6:58:57 PM	PHl3 MFC set to  0.000000
5/25/2010	6:58:57 PM	SiCl4 MFC set to  0.000000
5/25/2010	6:58:57 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	6:58:57 PM	Tube furnace set to 0
5/25/2010	6:59:31 PM	Helium valve closed
5/25/2010	6:59:31 PM	H2 valve closed
5/25/2010	6:59:31 PM	BCl3 valve closed
5/25/2010	6:59:31 PM	PH3 valve closed
5/25/2010	6:59:31 PM	SiCl4 pre valve closed
5/25/2010	6:59:31 PM	SiCl4 post valve closed
5/25/2010	6:59:31 PM	Bubbler valve closed
5/25/2010	6:59:31 PM	Main Vac valve opened
5/25/2010	6:59:31 PM	Bypass valve opened
5/25/2010	6:59:31 PM	Helium MFC set to  0.000000
5/25/2010	6:59:31 PM	H2 MFC set to  0.000000
5/25/2010	6:59:31 PM	BCl3 MFC set to  0.000000
5/25/2010	6:59:31 PM	PHl3 MFC set to  0.000000
5/25/2010	6:59:31 PM	SiCl4 MFC set to  0.000000
5/25/2010	6:59:31 PM	Bypass solenoid MFC set to  0.000000
5/25/2010	6:59:31 PM	Tube furnace set to 0
5/25/2010	6:59:31 PM	Run finished at 6:59 PM
5/25/2010	6:59:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
